Article

Article title DESIGN OF THE GAUGE OF DYNAMIC DEFORMATIONS ON THE BASIS OF FERROELECTRIC FILMS TSIRKONATTITANATA OF LEAD
Authors D.A. Kovalenko, V.V. Petrov, V.G. Klindukhov
Section SECTION III. INFORMATION SYSTEMS, DEVICES
Month, Year 04, 2014 @en
Index UDC 531.768
DOI
Abstract The article includes complex research of ferroelectric films of PZT on the silicon substrates landed by high-frequency reactive pulverization. Optimum parameters of evaporation are determined. Structural and electrophysical researches are done. It showed dependences of structural and electrophysical parameters of samples on technological parameters of evaporation. Growth of thickness of a film is directly proportional to time of dispersion and makes 600 ± 60 nm/h. Capacities of the received samples lie in the range from 200 to 2000 pF. Results of research showed that values of polarization of samples lie in the range of 0,6 – 24 µC/cm2. Calculated values of piezoelectric modulus lie in the range of 0,4x10-12 – 140x10-12 C/N. Prototypes of sensor elements are created and influence on them dynamic deformations is probed. Results of researches showed that it is possible to select optimal sensitivity range by variation of structural parameters of a sensory element of the detectors of dynamic deformations based on ferroelectric films. The working prototype of the detector of vibration and acceleration based on the created sensor constructions is done.

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Keywords Ferroelectric material; high-frequency reactive pulverization; sensor element; detector of dynamic deformations; structural researches; electrophysical researches; piezoelectric modulus; polarization.
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