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Article title SIMULATION OF LASER ANNEALING STRUCTURES «SILICON-DIELECTRIC VITREOUS»
Authors S.P. Maljukov, I.V. Kulikova, G.V. Kalashnikov
Section SECTION V. MODELLING OF COMPLEX SYSTEMS
Month, Year 07, 2011 @en
Index UDC 519.633; 621.383
DOI
Abstract On the basis of numerical methods developed transient two-dimensional model of the laser light to obtain high-quality epitaxial silicon layers on a substrate of borosilicate glass. The model takes into account the unevenness of optical and physical parameters of semiconductor structures and parameters of laser radiation. The software on the basis of the developed model has allowed to select the optimal treatment regimen chosen structure, as well as to determine the optimal values of the laser radiation and to optimize the process of "laser annealing" silicon on a substrate of borosilicate glass.

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Keywords Modeling; laser radiation; thin-film solar cell; glassy insulator; laser annealing.
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