Article

Article title ABOUT THE INFLUENCE OF ELECTRON-BEAM PROCESSING ON THE SURFACE OF DIELECTRIC FILMS ON THE BASIS OF Al2O3
Authors S.P. Avdeev, E.V. Lugovoy, P.V. Serba
Section SECTION II. NANOMATERIALS
Month, Year 04, 2011 @en
Index UDC 621.382.81
DOI
Abstract In the work questions of synthesis thin monolith films by sol-gel technology with electron beam recrystallization is considered. Aluminiumisopropoxide was selected as a film-forming basis, which allows gaining high clean xerogel. This nonuniform state of a film is a starting substance for recrystallizing by electron beam in the monolithic film Al2O3. It is demonstrated that at electron-beam processing at low preheating temperature of sample, insular monolithic films Al2O3 may be formed. The results of experimental researches are given and the mechanism of obtained films formation is offered.

Download PDF

Keywords Sol-gel technology; alumina (Al2O3); electron-beam processing.
References 1. Ruppi S., Larsson A. Chemical vapour deposition of k-Al2O3 // Thin Solid Films. – 2001. – № 388. – P. 50-61.
2. Siddhartha K. Pradhan, Philip J. Reucroft, Yeonkyu Ko Crystallinity of Al2O3 films deposited by metalorganic chemical vapor deposition // Surface and Coatings Technology. – 2004. – № 176. – P. 382-384.
3. Nobuyuki Kawakami, Yoshihiro Yokota, Takeshi Tachibana, Kazushi Hayashi, Koji Kobashi Atomic layer deposition of Al2O3 thin films on diamond // Diamond & Related Materials. – 2005. – № 14. – P. 2015-2018.
4. Yadong Zhang, Jacob A. Bertrand, Ronggui Yang, Steven M. George , Y.C. Lee. Electroplating to visualize defects in Al2O3 thin films grown using atomic layer deposition // Thin Solid Films. – 2009. – № 517. – P. 3269-3272.
5. Gottmann J., Kreutz E.W. Pulse laser deposition of alumina and zirconia thin films on polymers and glass as optical and protective coating // Surface and Coating Technology. – 1999. – № 116-119. – P. 1189-1194.
6. Chengbin Jing, Xiujian Zhao, Yongheng Zhang Sol – gel fabrication of compact, crack-free alumina film // Materials Research Bulletin. – 2007. – № 42. – P. 600-608.
7. Masalski J., Gluszek J., Zabrzeski J., Nitsch K., Gluszek P. Improvement in corrosion resistance of the 316l stainless steel by means of Al2O3 coatings deposited by the sol-gel method // Thin Solid Films. – 1999. – № 349. – P. 186-190.
8. Авдеев С.П., Милешко Л.П., Музыков П.Г., Чередниченко Д.И. Перспективы применения электронно-лучевой обработки для модификации золь-гельных пленок легированного диоксида кремния // Физика и химия обработки материалов. – 1998. – № 2. – C. 77-83.
9. Кравченко А.А., Лохов Ю.Д., Чередниченко Д.И. О формировании предельно гладких поверхностей стекол // Физика и Химия стекла. – 1990. – № 6. – С. 923-927.

Comments are closed.