Article

Article title THE PROCESSING DEVICE OF CAPACITOR CONVERTERS SIGNALS OF A MICROMECHANICAL GYROSCOPES
Authors B.G. Konoplev, E.A. Ryndin, I.E. Lysenko
Section SECTION III. NANOSYSTEMIC TECHNOLOGY
Month, Year 04, 2011 @en
Index UDC 621.3.049.77
DOI
Abstract А processing integrated device structural and electric basic schemes of capacitor signals converters of a micromechanical gyroscope on the basis of the analysis of frequency bending around a differential signal, formed by generators of harmonious fluctuations are developed, which are included the capacitor converters of a micromechanical gyroscope working in an antiphase. Results of modeling are received. It is shown that the offered scheme in microelectronic execution provides measurement of a difference of capacities of converters less than 0,3 fF and is characterized by linear dependence of frequency of an output signal on a difference of entrance capacities.

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Keywords Device; processing signal; microelectromechanical systems; sensor; gyroscope.
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