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Article title COMPREHENSIVE APPROACH TO TECHNOLOGICAL EQUIPPING FOR R&D CENTER. THE EXPERIENCE IN IMPLEMENTING OF SEC «NANOTECHNOLOGY» SFedU
Authors A.N. Alexeev, I.A. Sokolov, O.A. Ageev, B.G. Konoplev
Section SECTION V. INSTRUMENTS AND DEVICES FOR NANOTECHNOLOGY
Month, Year 04, 2011 @en
Index UDC 621.38
DOI
Abstract The most urgent problem today for the Russian R&D centers is to provide advanced "Nanolabs", complete with the latest technology and equipment, providing solutions for a wide class of problems in the field of semiconductor devices. Development of modern devices based on advanced nanoheterostructures, with following statement of their production to the domestic industrial enterprises, greatly hampered by the lack of adequate modern technological equipment and technological support. Nowadays, with the support of the Ministry of Education and Science of the Russian Federation SemiTEq creates a key product "Nanolab" which is a complete solution for R & D centers.

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Keywords Nanolab; nanoheterostructure; semiconductor devices; MBE; pHEMT-transistor.
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