Article

Article title CLUSTER EQUIPMENT FOR DEVELOPMENT AND STUDYING THE ELEM ENTS OF NANOELECTRONICS
Authors V.A. Bykov
Section SECTION V. INSTRUMENTS AND DEVICES FOR NANOTECHNOLOGY
Month, Year 04, 2011 @en
Index UDC 621.3.049
DOI
Abstract Over a number of years NT-MDT Co has developed the concept of creating the multifunctional scientific-technological complex with the integration of the state-of-the art scientific and technological equipment from the world-famous producers. At the present time this concept is realized in NANOFAB modular platform. NANOFAB is developed to assemble nanotechnology facilities with the cluster arrangement of their modules. The historical aspects of creating the cluster technological equipment in USSR and Russia were considered in this article. Moreover, the advantages of cluster configuration of technological modules over the linear scheme were analyzed and the development prospects of experimental technological equipment for macro- and nanosystems creating were specified.

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Keywords Claster equipment; ultrahigh vacuum; nanotechnology platform.
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