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Article title FORMATION AND RESEARCH OF CATALYTIC STRUCTURES OBTAINED FROM Ni FILMS FOR GROWING CARBON NANOTUBES
Authors V.S. Klimin, O.A. Ageev, I.O. Ilin, A.A. Fedotov
Section SECTION VI. BRIEF MESSAGES
Month, Year 04, 2011 @en
Index UDC 001.89: 539.2 (621.382.132)
DOI
Abstract Catalytic centers are form ed on a substrate of nickel film on a silicon substrate with a sublayer of vanadium, heated in the reactor module nanotech complex NANOFAB NTF-9 in the working atmosphere of ammonia gas, and argon. Were investigated regimes of catalytic centers in various stages of their formation is also carried out experiments on the effect of pressure on the activation phase. The dependencies of their geometric parameters such as diameter, average height, roughness, volume, and others from the formation temperature. Information obtained from the plots, possible to optimize the growth process of carbon nanotubes by plasma enhances chemical vapor deposition.

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Keywords Catalytic centers; carbon nanotubes; chemical vapor deposition in the induced plasma.
References 1. Meyyappan M., Cassell A., Delzeit L., Hash D. Carbon nanotube growth by PECVD // Appl. Phys. Lett. – 2002. – № 81 (901).
2. Агеев О.А., Коломийцев А.С., Михайличенко А.В., и др. Получениe наноразмерных структур на основе нанотехнологического комплекса НАНОФАБ НТК-9 // Известия ЮФУ. Технические науки. – 2011. – № 1 (114). – С. 109-116.

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