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Article title DESIGN METHOD OF TWO-AXIS MICROMACHINED GYROSCOPE-ACCELEROMETER RR-TYPE
Authors I.E. Lysenko
Section SECTION VI. BRIEF MESSAGES
Month, Year 04, 2011 @en
Index UDC 621.3.049.77
DOI
Abstract Actual problem is working out of approaches to construction of functionally integrated micromechanical gyroscopes-accelerometer providing measurement of angular speeds and linear accelerations on several axis of sensitivity, possessing high degree of integration and allowing to lower masses characteristics of microsystems, at the expense of reduction of the substrate area used under placing of each integrated sensor. In designs of gyroscopes and accelerometers similar constructive elements are applied, therefore the same schemes of construction can be applied to their working out. Design method of two-axis micromechanical gyroscope-accelerometer RR-type is described. Gyroscope-accelerometer model are developed.

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Keywords Method; design; microelectromechanical systems; sensor; gyroscope; accelerometer.
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