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Article title TECHNOLOGICAL ASPECTS AND FEATURES OF SENSORS HYBRID SYSTEMS
Authors V.V. Polyakov
Section SECTION I. NANOELECTRONICS
Month, Year 09, 2014 @en
Index UDC 621.38-022.532
DOI
Abstract Technological aspects and design features of hybrid sensor systems are considered in this paper. The features and principles of the hybrid sensor systems elements are discussed; their ranging on design features and technology of elements formation is given. A hybrid sensor systems classification by structural and technological features has been offered. The possibility of using different materials and technologies in the formation of hybrid systems elements based on biocompatibility has been considered. It is noted that at the design and development of the sensory system it is necessary to consider the size factor, which is the size of the studied objects. Here provides the basic technological processes of forming hybrid systems elements. The classification of etching processes is also given. Such basic principles underlying the design of sensor systems devices as the principle of multilevel; principle of multi-channel (parallel); principle of convergence; divergence principle and principle of feedback are described. The main tasks and directions of research in the field of hybrid sensor systems are formulated.

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Keywords Hybrid sensor system; technology; microsystem; nanotechnology; biosensor; classification.
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