Authors E.Yu. Gusev, V.A. Gamaleev, A.S. Mikhno, A.V. Bykov, J.Y. Jityaeva
Month, Year 09, 2014 @en
Index UDC 629.052.7
Abstract The work is related to development of cantilevers with integrated registration system of beam deflection, based on the piezoelectric effect. Restriction of traditional cantilevers applicabil- ity is conditioned by need for external hardware – technically difficult systems of optical deviations registration. As the direction of solving the miniaturization and extending the AFM scope problems, development of cantilever with the integrated system abnormalities and their registration, including on the basis of piezoelectric effect is considered. It is known that the applicability and properties of the cantilever are determined by its design and geometry. In this paper a numerical effect simulation of the various contact metallization system on design options the deviation by the finite element method is carried out. The number of electrodes, their dimensions and material had being varied. The dimensions and the material of a cantilever basis and piezoelectric layer remained unchanged. The results allowed quantifying a design that is providing the maximum deviation at the fixed voltage. The developed model allows calculating the deviations of a squared piezocantilever with inter-digitated contact metallization system and various materials of functional layers when submitting allowable voltages.

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Keywords Cantilever; piezoelectric effect; beam deflection; atomic force microscopy.
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