Article

Article title THERMOCATALYTIC MULTISENSORY CHIP
Authors A.V. Lashkov, V.V. Dobrokhotov, V.V. Sysoev
Section SECTION III. NANOSYSTEMS TECHNOLOGY
Month, Year 09, 2014 @en
Index UDC 53.087
DOI
Abstract The realization and experimental approbation of gas-analysis multisensory chip operational on the base on thermo catalytic effect is submitted. The chip structure includes a gas-sensitive layer from granules Al2O3 functionalized by solutions of PdCl2 and H2PtCl6. The layer is putted over a crystal substrate SiO2/Si and segmented by coplanar Pt-electrodes with the formation of four sensor elements. The chip surface has been found to be quite developed with rather high surface-to-volume ratio. Researches on an assessment of gas-sensitivity of the thermo catalytic chip were carried out on the original experimental installation including ability to control flow quantity of test gas mixtures and data collection in real time. The developed chip samples are found to be sensitive to vapors of acetone and isopropanol in a mixture with air (concentration: 350000 ppm for acetone, 70000 ppm for isopropanol) which is shown as a substantial change of resistance (voltage) of the sensor elements. The chip vector signal formed by responses of the thermo catalyt- ic indicates a possibility to selectively recognize the test gas mixtures after processing by pattern recognition method (linear-discriminant analysis).The conclusion about advantages and disadvantages of the developed samples of multisensory chips is given and the ways to further develop such units based on thermo catalytic effect are proposed.

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Keywords Gas sensor; thermo catalytic sensor; gas analysing system; multisensory chip; gas-mixture recognition.
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