Article

Article title DESIGN METHOD OF MICROMECHANICAL COMPONENTS BASED ON THE MACROS LIBRARY
Authors I.E. Lysenko, O.A. Ezhova, I.V. Kulikova, N.K. Pristupchik
Section SECTION III. NANOSYSTEMS TECHNOLOGY
Month, Year 09, 2014 @en
Index UDC 621.3.049.77
DOI
Abstract This paper is devoted the development of a technique of designing micromechanical sensors of angular velocities and linear accelerations. The offered technique is based on the use of unified structural topological primitives developed by the authors. The components of microelectromechanical systems are characterized by high complexity of the design since when they must take into account various physical effects underlying their functioning. Taking into account complexity functional components of these micromechanical systems for reducing engineering time various methods of automation in the design are used, based on the computational basis. It is offered to broke data micromechanical components down into elements on a functional basis. The focus is on design methodology of micromechanical sensors of angular velocities and linear accelerations on the librarymicrofragments basis developed under the topology editor L-Edit CAD system Tanner EDA. Development of structural topological primitives microfragments is performed taking into account the technology specific rules of manufacturing process surface micromachining MUMPs.

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Keywords Microelectromechanical system; gyroscope; accelerometer; design model.
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