Authors D.A. Kovalenko, V.V. Petrov
Month, Year 08, 2015 @en
Index UDC 53.043
Abstract In article the researches of morphology of a surface and chemical composition of films of lead zirconate-titanate formed on the oxidized silicon substrates by method HF-jet dispersion on installation “Plasma-80 SE” are described. Researches of morphology of a surface of samples of PZT films were conducted by method of the atomic force microscopy (AFM) on probe nanolaboratory Ntegra. Statistical parameters of morphology of a surface decided of the Gwyddion program. As a result of processing of three-dimensional images of square sites of a surface of films the function graph of distribution of height of a profile of a surface ρ=f(h) is received. Fractal dimension (Df) were calculatedby means of the programand were in the range from 2,06 to 2,61. Also square parameter of a roughness of a surface (Rq)were calculated and vary from 0,9 to 44,6 nm. Profile of a surface of films of the samples are constructed, which show existence of the repeating structures. Researches of chemical and phase structures by X-ray photoelectron spectroscopy method were carried out on a x-ray photoelectronic spectrometer of system “K-Alpha”.Kα12-line Al (hν = 1486,6eV) was used as a source of a X-ray radiation. The vacuum in an analyzer chamber was not worse 2,5x10-9 mbar during experiment. X-ray photoelectron spectroscopy showed that the formula of the samples of ferroelectric PZT films on the oxidized silicon substrates are Pb(Ti0,49, Zr0,51)O3.

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Keywords Lead zirconate titanate; ferroelectric materials; high-frequency reactive sputtering; AFM; X-ray photoelectron spectroscopy; morphology of a surface; chemicalstructure.
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