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Article title FABRICATION FIELD EMISSION NANOELECTRONICS DEVICES BASED ON GRAPHENE FILMS ON SILICON CARBIDE USING FOCUSED ION BEAM
Authors A.M. Svetlichnyi, A.S. Kolomiytsev, I.L. Jityaev, O.B. Spiridonov
Section SECTION I. NANOELECTRONICS
Month, Year 09, 2015 @en
Index UDC 621.385.21
DOI
Abstract The work is dedicated to the making of nanosized field emission structures by focused ion beam (FIB). It is shown that the FIB method provides the formation of the planar and tip probes with the different kinds of shapes and sizes. Silicon carbide and graphene on silicon carbide used as materials of field emission cathodes. Graphene is fabricated by decomposition of silicon carbide in vacuum. The spike form and planar type of field emission cathodes are considered in the article. Modes of formation of nanoscale field-emission cathodes by FIB are investigated. Designs of cathodes were developed and field-emission cathodes with a radius of rounding of the top less than 100 nm are made. Spike type of field emission cathodes was made of silicon carbide, followed by the formation of graphene films on the surface. Etching of field emission cathodes in the form of of a spike was made in a two-stage operation. In the first stage etching was performed at an ion beam current – 3 nA. In the second stage finishing of a spike was made by precision ion etching with a minimum value of the current of the ion beam, which allowed us to obtain a spike structure with a radius of rounding ~ 25-30 nm. Planar type of field emission cathodes was formed from the films of graphene on silicon carbide. It was established that in order to minimize the influence of the lateral etching topological pattern on the result of the etching, it is necessary to take into account the shape of the ion beam, described by a Gaussian distribution. The images of the field emission cathodes was obtained using scanning electron (SEM) and scanning probe microscopy (SPM). The technique of the field emission cathodes parameters research based on the use of SPM was developed. The regularities of the influence of etching conditions on the geometric parameters of field emission nanostructures were determined.

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Keywords Field emission; focused ion beam; graphene; silicon carbide; cold cathode; nanotechnology.
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