Article

Article title HIGH-SENSITIVE SIGNAL PROCESSING DEVICES FOR MICROMECHANICAL GYROSCOPES AND ACCELEROMETERS
Authors E.A. Ryndin
Section SECTION IV. NANOSYSTEMS ENGINEERING
Month, Year 09, 2015 @en
Index UDC 621.3.049.77
DOI
Abstract The method of design of the signal processing device which process the data from capacitive transducer of micromechanical gyroscope and accelerometer is described. The scheme of the "capacity – frequency" converter, providing high sensitivity, stability over temperature and supply voltage and noise immunity due to differential principle of forming the output signal. Outputs of the harmonic generators are fed to the mixer, the output of which is formed the signal of the beating. The beat frequency is a difference frequency of the generators, and is determined by the difference of the capacitances of micromechanical converter. The signal beats with the output of the mixer is fed to the detector, produce the envelope of the signal, which is amplified by a linear amplifier and fed to the driver of output rectangular pulses of the appropriate frequency for subsequent digital processing. Frequency output of this circuit allows to optimize the subsequent digital processing of the registered values of the angular velocity or linear acceleration. The differencing principle of forming the output signal provides high sensitivity without the use of charge amplifiers, which improves the immunity of the circuit to noise. Use for forming output pulses of the two identical generators provides a partial compensation for temperature changes in the output frequency, extending the operating temperature range of the device. To evaluate the effectiveness of the proposed method of creation of processing signal devices of capacitive converters of micromechanical gyroscopes and accelerometers prototypes of analog and digital variants of the signal processing devices for capacitive micromechanical transducers are designed, fabricated and tested.

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Keywords Micromechanical gyroscope; accelerometer; signal processing.
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