Article

Article title SIMULATION OF A MICROMECHANICAL GYROSCOPE WITH TWO SENSITIVE AXES
Authors I.E. Lysenko, F.M. Bondarev, O.A. Ezhova, R.I. Tarasov
Section SECTION IV. NANOSYSTEMS ENGINEERING
Month, Year 09, 2015 @en
Index UDC 621.3.049.77
DOI
Abstract Microsystem technology components, such as the angular velocity sensors, are widely used in various fields: space industry, medical equipment, home appliances, games of a new generation, automotive, etc. To measure necessary parameters of an object in space, information on the sensor elements have mutually orthogonal axes, which in turn leads to an increase in overall size and weight of microsystems, decrease in reliability of the measuring unit, increasing the level of internal noise. To solve this problem - to improve the weight and size characteristics of these microsystems and to allow registration of parameters for multiple axes can be integrated using the gyroscope with two axes of sensitivity. Thus, an urgent task is to develop a design angular velocity sensors – two-axis gyroscopes. The main objectives of the development of these sensors is to improve the basic performance characteristics, reducing the weight and size parameters and the area occupied on the substrate, as well as reducing the cost of the designed product. Covered the main stages of design and creating a mathematical model of a micromechanical gyroscope with two axes of sensitivity. According with the proposed method of simulation calculations were performed their own shapes and frequencies of oscillation gyro sensor. Developed description of the construction on the high-level parameterized language VHDL-AMS. We have been analysing of the structure in the CAE system ANSYS. The technique works with arrays of data in accounting in the design of the sensor technological errors. The results obtained in the course of mathematical modeling, satisfy the requirements of the modern micromechanical gyroscope, which is important, given the steady increase in the quality of performance and lower prices for foreign products in the segment. Obtained data can be used in further development of structures taking into account possibilities busting model parameters.

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Keywords Microsystems technologies; microelectromechanical systems; elements base; micromachined component; rate sensor; gyroscope; design; model; modeling.
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