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Article title RESEARCH OF CHARACTERISTICS OF THE SENSOR OF VIBRATION ON THE BASIS OF SEGNETOELEKTRICHESKY FILMS OF ZIRCONATE-TITANATE OF LEAD
Authors V.V. Petrov, A.S.Kamentsev, I.I. Cherepakhin, D.A. Kovalenko
Section SECTION I. ELECTRONICS AND NANOTECHNOLOGY
Month, Year 10, 2016 @en
Index UDC 531.768
DOI 10.18522/2311-3103-2016-10-1219
Abstract Some properties of the films of the lead zirconate-titanate (PZT) created on the oxidized sili-con substrates are investigated. Films are received with the use of the developed technology. Sam-ples of ferroelectric PZT films composition Pb (Tix,Zr1-x)O3 were prepared by rf reactive plasma sputtering in an oxygen atmosphere on the "Plasma-80 SE". The films were deposited on oxidized silicon wafers brand KEP-4.5, the crystallographic orientation and 380 μm thick. SiO2 film thickness was 150 ± 20 nm, to thereby minimize the leakage currents from the ferroelectric film on the substrate. Thickness of a film of PZT made 1,48+0,18 microns. By means of the X-ray phase analysis it is established that the films have phase PZT. Crystal phase PZT corresponds to a chemical formula Pb (Ti0,5, Zr0,5)O3. On the surface of PZT films a contact metallization has been formed by thermal evaporation in a vacuum. The metallization formation allowed testing the adhesive properties of the substrate system (with sub-layer of SiO2) - PZT film - metal contacts. Adhesion properties of PZT films to the silicon oxide surface allowed withstanding the stress at break equal to 3.5 * 104 kg/m2. Electrical properties of ferroelectric materials were investigated by the Soyera-Tower method. The hysteresis loop DTN film samples for three frequencies - 0.1; 1.0 and 10.0 Hz and the "polarization" effect of the process on the films ferroelectric properties were investigated. It is shown that the greatest value of polarization equal to 0,0015 Kl/m2 is shown at the samples investigated at a frequency of 0,1 Hz, and the greatest contribution to polarization of samples is made by "slow" domains. The sensor design is developed to study its sensitivity on influence of amplitude and vibrations frequency. Sensor tests were conducted on an electrodynamic stand VSV-206200. The sensor was tested for impact accelerations of 0.08 to 5g in a frequency range of 2 to 90Hz. It is shown that sensitivity in the range of frequencies from 2 to 5 Hz was 60–75 pKl/g. In the specified range of frequencies the sensor sensitivity does not depend on the value of acceleration. The conclusion on possible practical application of the developed sensors is made.

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Keywords Lead zirconate-titanate; ferroelectric material; high-frequency jet dispersion; polarization, vibration sensor
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