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Article title INVESTIGATION OF THE INFLUENCE OF MODES OF PROFILING THE SURFACES OF STRUCTURES BASED ON ARSENIDE OF GALLIUM BY METHOD OF PLASMA ETCHING WITH ACCOUNT OF THE CHLORO CONTAINING GAS FLOW
Authors V.S. Klimin
Section SECTION III. NANOTECHNOLOGY
Month, Year 04, 2017 @en
Index UDC 389.159
DOI
Abstract This article deals with the problems of profiling the surface of structures based on gallium arsenide for subsequent epitaxial growth. The application of the method of plasma-chemical etching to solve this problem is considered. The characteristic features of this technology are analyzed, it is shown that the plasma-chemical etching method in a combined plasma in comparison with liquid etching for the formation of such structures is more promising due to the high anisotropy of the process and the absence of the need for additional operations to remove reaction products and foreign impurities contained in the starting reagents. For an experimental study of the interaction of structures based on gallium arsenide with combined plasma, a cylindrical flow-through plasma chemical reactor was used; the pressure of the mixture of plasma-forming gases was 2 Pa, which remained constant throughout the process. In this paper, the effect of a chlorine-containing gas stream on the thickness of the etched layer, the roughness of the etched surface, as well as the anisotropy of the process over different crystallographic regions were studied. The dependence of the thickness of the etched layer on the etching time was obtained and the etching rates for various chlorine-containing gas streams were estimated. The analysis of the surface by atomic force microscopy and scanning electron microscopy was carried out, and the roughness of the etched surface was studied. It is shown that for large values of chlorine-containing gas flows, the roughness of the etched region is increased, which is associated with a large number of particles responsible for the formation of volatile compounds with products of reactions of reactive ion etching. It was also shown that the deviation angle from the vertical for samples treated with a chlorine-containing gas NBCl3 of 15 cc / m for the crystallographic direction [110] was α [110] = 65.5 °; For the [111] direction was α [111] = 45.58 °. For samples treated with a flow of chlorine gas NBCl3 - 10 cc / m for the crystallographic direction [110], α [110] = 20.94 °; for the [111] direction was α [111] = 11.37 °. For samples, for samples treated with a chlorine-containing gas NBCl3 - 5 cc / m for the crystallographic direction [110], α [110] = 0.32 °; for the [111] direction was α [111] = 0.21 °.

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Keywords Nanotechnology; nanostructures; nanomaterial; gallium arsenide; plasma etching; planar technology ; atomic force microscopy.
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