Article

Article title DESIGN AND ANALYSIS OF A LINEAR ACCELERATION SENSOR
Authors I.E. Lysenko,O.A. Ezhova
Section SECTION IV. ELECTRONICS AND CONTROL
Month, Year 04, 2017 @en
Index UDC 621.3.049.77
DOI
Abstract Microsystem technology is a fast growing research and development field, the purpose of which is the creation of systems based on microoptoelectromechanical devices with a unique set of properties not available for their implementation in the form of conventional macro-systems. Mi-crosystems devices (sensors of linear acceleration, angular velocity sensors, actuators, etc.) are widely used in the aerospace industry, medical technology, next-generation games, automotive and many other areas. Today microsystems develop extensively. Microsystem devices such as sensors of linear acceleration and angle velocity, actuators and other devices are widely used in various areas: space industry, medical technology, consumer devices, game consoles of new generation, automotive industry and etc. So there is a relevant objective to develop design of linear acceleration sensor. Main aims of micromechanical sensors developing are improvement basic performance characteristic, reducing weight and dimensional characteristics and space occupied by designed sensor on a wafer, as result reduction of value of the sensor. In this work design of linear acceleration sensor with three sensitive axes is created and analysed, modal analyses of the created sensor along three sensitive axes, natural mode and vibration frequency of the sensor design are calculated, simulation of performance of the created design under the influence of linear ac-celerations is realized, description of the sensor design is developed on high-level language VHDL-AMS. From the results of the conducted research it is evident that the design of the elastic suspension of sensitive element of micromechanical accelerometer ensures the equality of frequen-cies along two axes of sensitivity. With the aim of obtaining equality of the natural frequencies along the three axes of sensitivity it is necessary to increase or decrease the length of the beams in the suspensions of the appropriate type.

Download PDF

Keywords Micromechanical system; linear acceleration sensor; accelerometer; design; model; modal analyses.
References 1. Verner V.D., Mal'tsev P.P., Reznev A.A., Saurov A.N., Chaplygin Yu.A. Sovremennye tendentsii razvitiya mikrosistemnoy tekhniki [Modern trends in the development of microsystem technology], Nano- i mikrosistemnaya tekhnika [Nano- and Microsystem technology], 2008, No. 8, pp. 2-6.
2. Luchinin V.V., Mal'tsev P.P. O termine «Mikrosistemnaya tekhnika» v russkom i angliyskom yazykakh [The term "Microsystem technology" in the Russian and English], Nano- i mikrosistemnaya tekhnika [Nano- and Microsystem technology], 2006, No. 2, pp. 39-41.
3. Timoshenkov S.P., Kul'chitskiy A.P. Primenenie MEMS-sensorov v sistemakh navigatsii i orientatsii podvizhnykh ob"ektov [The use of MEMS sensors in navigation and orientation of mobile objects], Nano- i mikrosistemnaya tekhnika [Nano- and Microsystem technology], 2012, No. 6, pp. 51-56.
4. Verner V.D., Ivanov A.A., Kolomenskaya N.G., Luchinin V.V. i dr. Izdeliya mikrosistemnoy tekhniki – osnovnye ponyatiya i terminy [Products of Microsystems engineering – basic con-cepts and terms], Nano- i mikrosistemnaya tekhnika [Nano- and Microsystem technology], 2007, No. 12, pp. 2-5.
5. Verner V.D., Ivanov A.A., Kolomenskaya N.G., Luchinin V.V. i dr. Izdeliya mikrosistemnoy tekhniki – terminy i opredeleniya, klassifikatsiya i oboznacheniya tipov [Products of Microsys-tems engineering – terms and definitions, classification and designation of types], Nano- i mikrosistemnaya tekhnika [Nano- and Microsystem technology], 2008, No. 1, pp. 2-5.
6. Mal'tsev P.P. O klassifikatsii v oblasti mikrosistemnoy tekhniki [On the classification in the field of Microsystem technology], Nano- i mikrosistemnaya tekhnika [Nano- and Microsystem technology], 2005, No. 1, pp. 9-10.
7. Gol'tsova M.M., Yudintsev V.A. MEMS: bol'shie rynki malykh ustroystv [MEMS: large markets small devices], Nano- i mikrosistemnaya tekhnika [Nano- and Microsystem technology], 2008, No. 4, pp. 9-13.
8. Gridchin V.A., Dragunov V.P. Fizika mikrosistem: ucheb. posobie [Physics of Microsystems: a tutorial]: In 2 part. Part 1. Novosibirsk: Izd-vo NGTU, 2004, 416 p.
9. Raspopov V.Ya. Mikromekhanicheskie pribory [Micromechanical devices]. Moscow: Mashinostroenie, 2007, 400 p.
10. Vasenko A., Epifanov V., Yudintsev V. Mikroelektromekhanicheskie sistemy. Nastalo vremya vykhodit' v svet [Microelectromechanical systems. It is time to go out], Elektronika: nauka, tekhnologiya, biznes [Electronics: science, technology, business], 1998, No. 5–6, pp. 55-59.
11. Aravin V.V., Verner V.D., Saurov A.N., Mal'tsev P.P. MEMS vysokogo urovnya – vozmozhnyy put' razvitiya MEMS v Rossii [MEMS high – level way of development of MEMS in Russia], Nano- i mikrosistemnaya tekhnika [Nano- and Microsystem technology], 2011, No. 6, pp. 28-31.
12. Prokof'ev I.V., Tikhonov R.D. Nano- i mikrosistemy dlya monitoringa parametrov dvizheniya transportnykh sredstv [Nano- and Microsystems for monitoring parameters of vehicle movemen], Nano- i mikrosistemnaya tekhnika [Nano- and Microsystem technology], 2011, No. 12, pp. 48-50.
13. Anchurin S.A., Maksimov V.N., Morozov E.S., Golovan' A.S., Shilov V.F. Blok inertsi-al'nykh datchikov [Unit inertial sensors], Nano- i mikrosistemnaya tekhnika [Nano- and Microsystem technology], 2011, No. 1, pp. 50-53.
14. Elwenspoek M., Wiegerink R. Silicon micro accelerometers, Mechanical microsensors, 2005, pp. 230-236.
15. Lysenko I.E. Modeling of the micromachined angular rate and linear acceleration sensors
LL-type with redirect of drive and sense axis, World Applied Sciences Journal, 2013, No. 27 (6), pp. 759-762.
16. Lysenko I.E. Integral'nyy sensor uglovykh skorostey i lineynykh uskoreniy [Integrated sensor of angular velocities and linear accelerations], Inzhenernyy vestnik Dona [Engineering journal of Don], 2010, No. 3. Available at: http://ivdon.ru/magazine/ (free access).
17. Lysenko I.E., Lysenko A.V. Integral'nye sensory uglovykh skorostey i lineynykh uskoreniy LR-tipa na osnove uglerodnykh nanotrubok // Inzhenernyy vestnik Dona [Engineering journal of Don], 2012, No. 4. Available at: http://ivdon.ru/magazine/ (free access).
18. Lysenko I.E., Ezhova O.A. Kriterii ravenstva sobstvennykh chastot kolebaniy chuvstvitel'nykh elementov mikromekhanicheskikh giroskopov-akselerometrov [The criteria of equality of the natural frequencies of oscillation of the sensitive elements of micromechanical gyroscopes-accelerometers], Inzhenernyy vestnik Dona [Engineering journal of Don], 2014, No. 2. Available at: http://ivdon.ru/ru/magazine/archive/n2y2014/2475 (free access).
19. Lysenko I.E. Funktsional'no integrirovannye mikro- i nanomekhanicheskie sensory uglovykh skorostey i lineynykh uskoreniy [Functionally integrated micro - and nanomechanical sensors of angular velocities and linear accelerations]. Taganrog: Izd-vo YuFU, 2013, 167 p.
20. Lysenko I.E., Kulikova I.V., Polishchuk E.V., Khayrulina V.A. Modelirovanie elementov mikrosistemnoy tekhniki v programme ANSYS [Modeling elements of Microsystems technol-ogy in the ANSYS program]. Taganrog: Izd-vo TTI YuFU, 2007, 42 p.
21. Abramov I.I. Problemy i printsipy fiziki i modelirovaniya pribornykh struktur mikro- i nanoelektroniki. Ch. II. Modeli poluklassicheskogo podkhoda [Problems and principles of physics and modeling of device structures of micro- and nanoelectronics. Part II. Model semiclassical approach], Nano- i mikrosistemnaya tekhnika [Nano- and Microsystem technol-ogy], 2006, No. 9, pp. 26-36.

Comments are closed.