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Article title DEVELOPMENT AND RESEARCH OF MODEL OF TWO-BEAM CANTILEVER ON THE BASIS OF POLYCRYSTALLINE SILICON
Authors S.V. Malohatko, E.Yu. Gusev, J.Y. Jityaeva, A.V. Bykov
Section SECTION V. NANOTECHNOLOGY AND MATERIALS SCIENCE
Month, Year 06, 2017 @en
Index UDC 621.382:669.691.5
DOI
Abstract The actual task of probe microscopy is the development and optimization of constructive-technological solutions of specialized cantilevers for a wide range of its methods for choosing the options for selecting materials, their number, their geometry, and the introduction of various func-tional layers. In this case, the choice of console material, different from the traditional one, as well as increasing the number of consoles, allows expanding its functionality and using it in several methods. The aim of this work is the development of a two-beam cantilever made of polycrystalline silicon for the vibrational technique of atomic force microscopy. The paper presents the results of numerical simulation of the deviation from finite elements, and also provides analytical calculations of the resonant frequency and the stiffness coefficient. The construction of a cantilever consisting of two beams of a rectangular shape located on both sides of the base, on the free ends of which there is a point, is considered. Polycrystalline silicon was used as a material for beams and a point. The thickness and width of the beams remained constant at 1.5 and 35 μm, respectively. The simulation was performed under the condition that the geometrical parameters of the tip and its position did not change: the tip height was 8 μm, the base radius was 3 μm and the tip radius was 45 nm, and the removal from the remaining beam parts was 105 μm. The calculated deviation values with an increase in the impact force of 100–1100 nN with a fixed beam length of 110 μm, as well as its length from 10 to 250 μm at a constant power from 100 to 1100 nN, from 20 to 300 and from 20 to 260 nm, respectively.Analytical calculations of the stiffness factor and resonance frequency with a change in length from 50 to 250 μm have been carried out (the question is why it has been shortened to a long, i.e., initial value from 10 to 50 μm). The obtained data made it possible to determine the design of a two-beam cantilever with geometric parameters providing an optimal ratio of the deviation, stiffness and resonant frequency of beams, and suitable for vibrational and contact methods of atomic force microscopy.

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Keywords Micro- and nanosystems; atomic force microscopy; two-beam cantilever; polycrystalline silicon.
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