Authors A. L. Gromov, A. S. Kolomiytsev, A. V. Kotosonova, N. A. Shandyba, I. V. Panchenko
Month, Year 07, 2018 @en
Index UDC 621.38-022
DOI 10.23683/2311-3103-2018-7-6-16
Abstract The paper presents the results of the development of the algorithm and software that allows to create raster patterns for maskless structuring of the surface of solids and the formation of nanoscale structures using the method of focused ion beams (FIB). A method for development of digital raster patterns based on the formation of BMP and ASCII files on the basis of mathematical expressions describing the desired surface relief, or profiles defined by a graphic file, has been developed. An algorithm is presented that considers the results of modeling the interaction of an ion beam with a substrate, as well as the evolution of a solid surface profile during FIB-milling. Experimental results are shown that take into account the process of changing the surface topography during etching under the influence of the angular dependence of the sputtering yield at each point, the effects of overlapping areas of FIB exposure during step-by-step movement and redeposition of the etched material. The developed software allows to create specialized patterns for various technological equipment that implements the FIB method, which can be used to create three-dimensional structures with high resolution and reproducibility of parameters, as well as automate the process of designing and generating patterns. A key feature of the developed software is the versatility and the ability to generate patterns for etching and deposition by the FIB method based on mathematical expressions and profiles specified in the form of two-dimensional graphs. The use of mathematical expressions is important when designing patterns for the manufacture of elements of integrated optoelectronics, such as Fresnel lenses and geodesic lenses. The use of two-dimensional profiles allows with high efficiency to create templates for the formation of structures of micromechanics and the tip of the probes for nanodiagnostics of the surface of solids. The ability to multiply the generated patterns is an important step towards improving the performance of lithographic processes based on FIB and the possibility of automating the process of small-scale production of micro- and nanostructures. The research results can be used in the development of promising technological processes for the formation of the element base of nanoelectronics and nano-mechanics using local nanostructuring methods based on ion and electron beams.

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Keywords Nanotechnology; focused ion beam; ion beam milling; submicron profiling; raster patterns.
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