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Article title PRODUCTION OF SILICON-CARBON FILMS ON CONDUCTIVE AND DIELECTRIC SUBSTRATES BY THE METHOD OF ELECTROCHEMICAL DEPOSITION
Authors M. N. Grigoryev, T. S. Mikhailova, T. N. Myasoedova
Section SECTION I. ELECTRONICS AND NANOTECHNOLOGY
Month, Year 07, 2018 @en
Index UDC 692.793.3
DOI 10.23683/2311-3103-2018-7-56-66
Abstract These silicon-carbon films and manganese-doped silicon-carbon films by type of structure, which has a significant impact on their properties, belong to the class of nanocomposite materials. The resulting silicon-carbon films are very promising for their use as electrodes of supercapacitors with electrolyte having increased chemical activity, active elements of gas sensors, chemically and mechanically resistant coatings and for the creation of electrodes of field emission devices. Production of pure silicon-carbon films and manganese-doped silicon-carbon films by electrochemical method was described in paper. Silicon wafer 4,5 (100) and polycor cut to the required dimensions and use as substrates. Methods of scanning electron microscopy (SEM), Raman spectroscopy, and x-ray diffractometry (XRD) were used to study the structure, chemical and phase composition of the obtained films. The technology of obtaining chemically resistant electrical contacts on silicon – carbon films was developed. These contacts consist of three metal layers: chromium – copper - chromium (Cr-Cu-Cr) deposited by magnetron sputtering. Metal mask was used for obtaining the necessary topology. Electrical contacts to silicon – carbon films were formed with using the developed technology and the electrophysical properties of the obtained resistive structures were investigated. The thickness of the samples was about 300 and 500 nm for “pure” and doped silicon-carbon films, respectively. To study the structure, chemical and phase composition of the films obtained, the methods of raster electron microscopy (SEM), Raman spectroscopy, and X-ray diffractometry were used. As a result, it was shown that manganese is incorporated into the structure of the silicon-carbon matrix with the formation of a silicide (Mn5Si2). The presence of unbound manganese atoms and the Mn5SiC phase is also noted. The study of the electrical characteristics of silicon-carbon films showed that the introduction of a manganese atom reduces the electrical resistance of the samples by 20 %. In addition, the influence of the type of substrate on the nature of the temperature dependence of the resistance of both “pure” and doped films is noted.

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Keywords Silicon – carbon films; metal nanocomposites; electrochemical deposition.
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